Aluminium nitride ceramic muaj qhov zoo ntawm kev ua haujlwm siab thermal, zoo hluav taws xob rwb thaiv tsev thiab dielectric cov khoom nyob rau hauv qhov kub kub ib puag ncig, cov khoom siv lub zog ntawm qhov kub siab, tsis tshua muaj thermal nthuav coefficient txuam nrog semiconductor silicon cov ntaub ntawv, tsis muaj tshuaj lom, thiab lwm yam, AlN Aluminium Nitride yog qhov zoo tshaj plaws tshav kub dissipation khoom rau ceramic substrates thiab hluav taws xob ntim. Lub ntsiab lus tseem ceeb thiab qhov ua tau zoo ua haujlwm ntawm txhuas nitride ceramic yog qhov siab thermal conductivity. Txawm hais tias lub thermal conductivity ntawm aluminium nitride tuaj yeem ncav 320W / (m · K) hauv kev tshawb xav, cov thermal conductivity ntawm cov khoom lag luam tiag tiag yog los ntawm impurities thiab tsis xws luag hauv txhuas nitride. Tus nqi qis dua 200W / (m · K). Lub hauv paus tseem ceeb cuam tshuam rau thermal conductivity ntawm aluminium nitride ceramics yog cov ntsiab lus oxygen ntawm cov ntxaij ntoo siv lead ua, ntom ntom, microstructure, thiab hmoov huv. Hauv qab no yog cov lus qhia rau ntau lub ntsiab tseem ceeb.
1. Cov ntsiab lus oxygen thiab impurities
Rau aluminium nitride ceramics, vim nws muaj zog sib luag rau cov pa, oxygen impurities yooj yim mus rau hauv cov AlN ntxig thaum ua cov txheej txheem sintering, uas cuam tshuam ncaj qha rau ntau yam tsis xws luag thiab yog qhov tseem ceeb uas cuam tshuam rau thermal conductivity ntawm aluminium nitride Cov. Hauv lub suab xov-lub teeb meem tawg, lub luag haujlwm tseem ceeb yog qhov tsis muaj pa oxygen thiab alumina. Vim tias txhuas nitride tau yooj yim hydrolyzed thiab oxidized, ib qho txhuas oxide zaj duab xis yog tsim nyob rau saum npoo, thiab cov txhuas oxide yog yaj mus rau hauv cov txhuas nitride siv lead ua daim tawv ntoo. Ua kom cov txhuas nitride siv lead ua teeb meem tshwm sim anharmonic, cuam tshuam rau lub suab xov tawg, kom cov thermal conductivity ntawm aluminium nitride ceramics yog txo qis.
2. Cov ceev
Raws li lub thermal conductivity ntawm aluminium nitride, ntau ntawm lub qhov hws hauv qhov ntsuas qis tsis zoo yuav cuam tshuam cov tawg xov, txo lawv txoj kev ywj pheej, thiab yog li txo cov thermal conductivity ntawm aluminium nitride ceramics. Nyob rau tib lub sijhawm, cov yam ntxwv ntawm kev ntsuas ntawm qhov ntsuas qis tsis zoo yuav ua tsis tau raws li qhov yuav tsum tau ua ntawm cov ntawv thov ntsig txog. Yog li no, qhov siab ceev yog qhov yuav tsum tau ua ua ntej rau aluminium nitride ceramics kom muaj cov cua kub ua haujlwm siab.
3. Microstructure
Lub microstructure ntawm aluminium nitride ceramics muaj ib tus-rau-ib qho kev tiv thaiv nrog nws cov khoom muaj cov thermodynamic. Lub microstructure suav nrog qhov loj me, morphology, thiab cov ntsiab lus thiab faib tawm theem thib ob ntawm thaj tsam lis. Lub sijhawm tam sim no aluminium nitride ceramic yog ntau theem polycrystalline, uas yog tsuas yog tsim ntawm txhuas nitride siv lead ua theem, aluminate theem ob (grain ciam theem) thiab pores thiab lwm yam tsis xws luag. Ntxiv nrog rau kev kawm lub ntxaij ntoo tsis xws luag ntawm txhuas nitride, muaj ntau tus neeg kuj tau kawm txog lub pob zeb ci, lis ciam thaj morphology, muaj pes tsawg leeg, cov ntsiab lus, cov ntsiab lus, thiab faib cov nplej ciam theem ntawm txhuas nitride, thiab lawv cov kev sib raug zoo nrog thermal conductivity. Tom qab kev tshawb fawb dav, feem ntau ntseeg tau hais tias qhov faib ntawm aluminate theem ob muaj qhov tseem ceeb tshaj plaws rau cov thermal conductivity.
