Silicon Nitride Substrate

Silicon Nitride Substrate los ntawm UNIPRETEC yog ua los ntawm Si3N4 ceramic. Txhawm rau kom txo cov kuab paug ib puag ncig thiab tsim kom muaj kev lag luam ntsuab, kev siv hluav taws xob tau siv ntau dua thiab tseem ceeb, uas tseem ua rau kom muaj ntau dua qhov yuav tsum tau ua kom muaj cua sov ua kom tsis muaj teeb meem nyob hauv cov khoom siv hluav taws xob. Qhov tsis zoo ntawm cov tsoos ua ib pawg substrates xws li AlN, Al2O3, thiab BeO ntawm qhov nce ntxiv, xws li qis theoretical thermal conductivity thiab cov khoom siv tsis zoo, tau cuam tshuam loj heev rau nws txoj kev txhim kho. Piv nrog tsoos cov ntaub ntawv tso cai ceramic, silicon nitride ceramic tau maj mam dhau los ua qhov tshiab tshaj tawm cov khoom cua sov xaiv rau cov khoom siv hluav taws xob vim nws zoo theoretical thermal conductivity thiab cov cuab yeej zoo zog.

Txawm li cas los xij, qhov tseeb thermal conductivity ntawm Si3N4 phaj yog qis tshaj qhov theoretical thermal conductivity, thiab qee qhov siab thermal conductive silicon nitride ceramic substrates (GG gt; 150 W / m · K) tseem nyob hauv chav kuaj. Lub hauv paus ntsiab lus uas cuam tshuam txog thermal conductivity ntawm silicon nitride ceramics suav nrog cov ntxaij ntoo oxygen, cov theem siv lead ua thiab cov ciam lis lis. Tsis tas li ntawd, cov qauv siv lead ua hom kev hloov kho thiab cov kev qhia lub teeb tsa crystalline tuaj yeem cuam tshuam cov thermal conductivity ntawm silicon nitride rau qee yam. Yuav ua li cas kom ua tiav qhov loj ntawm Si3N4 ceramic substrate kuj yog teeb meem loj.

Cov Ntaub Ntawv Cov Ntawv

Data Cov ntaub ntawv saum toj no yog qhia rau kev siv thiab sib piv xwb, cov ntaub ntawv qhia kiag yuav txawv nyob ntawm kev tsim khoom thiab ntu kev teeb tsa.

Txhawm rau daws cov teeb meem no, UNIPRETEC tau cog lus rau kev ua kom zoo txuas ntxiv ntawm cov txheej txheem npaj ntsig txog, thiab qhov tseeb thermal conductivity ntawm silicon nitride phaj kuj tseem txhim kho. Txhawm rau kom txo qis oxygen cov ntsiab lus ntawm lub ntxaij ntoo, ua ntej txo cov pa oxygen hauv kev xaiv ntawm cov ntaub ntawv nyoos. Ntawm ib sab, Si hmoov nrog cov pa oxygen tsawg cov ntsiab lus tuaj yeem siv los ua cov khoom siv pib. Thib peb, xaiv cov khoom haum sintering tsim nyog tseem tuaj yeem ua rau cov thermal conductivity los ntawm kev txo cov pa oxygen. Tsis tas li ntawd, los ntawm kev ntxiv cov noob muaju thiab nce qhov sintering kub los txhawb cov qauv siv lead ua hloov, thiab los ntawm kev siv lub chaw sib nqus kom ua kom cov nplej loj tuaj ntxiv, cov thermal conductivity tuaj yeem hloov kho kom txog rau qee yam. Txhawm rau ua kom tau raws li qhov loj me ntawm cov khoom siv hluav taws xob, UNIPRETEC siv cov txheej txheem ntim txheej txheem txheej txheej los npaj cov ntawv silicon nitride, wafer, substrate.

Cim npe nrov: silicon nitride substrate, Tuam Tshoj, cov chaw muag khoom, chaw tsim khoom